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Metrology
field of measurement.
See Also: Measurement, Instrumentation, Coordinate Measuring Machines
- Valhalla Scientific Inc.
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100-Amp Current Calibrator And AC/DC Transconductance Amplifier
2555A
World’s Leading Precision 100-Amp AC/DC Current Standard - For 30 years Valhalla Scientific’s design has proven rock-solid reliability in metrology labs worldwide. The 2555A is a calibration powerhouse with wide-ranging applications and unsurpassed quality.
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DC Current Shunts
DC current shunts / standards are true 4-terminal devices that precisely measure DC currents from 10 A to 10,000 A. They use special alloys in the resistive elements which are supported on an insulating base for mechanical stability. The 9230A includes special features to reduce the effects of power dissipation and associated self heating errors. These shunts are designed to operate in air at full rated current. These are the best performing, and most widely used, DC metrology shunts in the world.
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In-Line Spectroscopic Ellipsometer for Web Coater and Roll to Roll Systems
UVISEL
The UVISEL Spectroscopic Phase Modulated Ellipsometer is a turn-key thin film metrology instrument for in-line measurement of thin film thickness and optical properties. It features rapid measurement capability with data acquired every 50 ms for powerful control of thin film uniformity across the entire web.The design of the UVISEL ellipsometric heads allows simple integration into roll-to-roll systems, while the software provides advanced communication capabilities suited to roll-to-roll production.
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Metrology Systems
VIEW offers a full line of optical metrology systems for wafer, photomask, slider, MEMS, semiconductor package, HDD suspension, probe card, and micro-component process measurements.
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3D Optical Microscopy
Bruker is the worldwide leader in 3D surface measurement and inspection, offering fast, non-contact analyses for samples ranging in size from microscopic MEMS to entire engine blocks. Our microscopes are the culmination of ten generations of proprietary Wyko® Technology advances that provide the high sensitivity and stability necessary for precision 3D surface measurements in applications and environments that are challenging for other metrology systems.
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Warpage Metrology System
TableTop Shadow Moiré (TTSM)
Measure warpage of substrates up to 300mm x 310 mm (a 300mm wafer or two JEDEC trays) with the entire measurement taking less than two seconds. Whether individual parts or a JEDEC tray of multiple parts, the TTSM provides an ultra-fast and highly accurate measurement at room temperature that is suited for tabletop use.
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SlipFinder
YIS and SF Series
The YIS and SF Series metrology systems are designed for optical detection of wafer defects such as crystaldislocations, slip and other defects. The YIS-300HM (for 300 mm wafers) and YIS-200HM (for 200 mm wafers) utilizeMakyoh optics technology (Magic Mirror) and integrated robotic wafer handler provided by Hologenix.The SF300M and SF300N systems offer a low cost functionally equivalent alternative to the YIS series.
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Metrology
KLA’s metrology systems address a range of chip and substrate manufacturing applications, including verification of design manufacturability, new process characterization and high volume manufacturing process monitoring. By providing precise measurement of pattern dimensions, film thicknesses, layer-to-layer alignment, pattern placement, surface topography and electro-optical properties, our comprehensive set of metrology systems allows chip manufacturers to maintain tight control of their processes for improved device performance and yield.
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Metrology System
Atlas V
The new Atlas V metrology system is designed to measure several key steps that include buried features, not visible by CD-SEM and other techniques. Through remarkable improvements in the optical systems, mechanical sub-systems and software algorithms, the Atlas V system can precisely measure the very subtle variations for device parameters and reveal weak process corners for engineers to improve their process robustness in the fab.
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Dimensional Metrology
Integrated Metrology Family
Nova Measuring Instruments Inc.
Nova is the market leader in the space of integrated metrology platforms with multiple generations of products. Our integrated metrology platforms enable advanced process control (APC) to monitor and control wafer to wafer variations of complex high-end CMP and Etch applications with high productivity and reliability required for the most advanced logic and memory technology nodes.
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SPC Software Gauging Software
Solartron Metrology offer three Software packages which offer the user different features at different prices.
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Non Contact Measurement
There is no one-size-fits-all solution for accurate measurement, and different applications require different measurement systems. At Vision Engineering, we design and manufacture a broad range of non-contact measurement systems from toolmakers’ measuring microscopes to fully automated CNC video measuring systems with optional contact measurement available. Combined with the latest metrology software solutions available, we offer the right tool for the job.
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HV Calibration
B-1027
Ross Engineering Corporation’s High Voltage Calibration Lab provides high accuracy capability for conducting tough reliability tests on all our high voltage devices. In this facility we test and calibrate HV Relays, HV Dividers, HV Probes, Spark Gaps, our Fiber Optic Systems, and HV Digital Voltmeters up to 450kV. We provide our own in house test lab to ensure Ross products meet or exceed required safety standards as well as our own high standards of dependability, long life and quality. Our technicians use test equipment calibrated by or traceable to National Institute of Standards and Technology or other national metrology institute to provide the highest in testing accuracy.
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Compact Horizontal Gage
1302
The Adcole Model 1302 represents a significant advance in precision metrology, and is an essential part of the production process for sliding cam and shifting camshaft components. The camshaft gage features two opposing measuring heads to maximize speed and achieve faster cycle time, while still delivering the sub-micron accuracy and repeatability that have defined Adcole gages as the world standard in cam/crank metrology.
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Metrology
Optical critical dimension (OCD) metrology and film metrology require accuracy and repeatability. Onto Innovation's techniques are well-established and trusted by semiconductor manufacturers around the globe.
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Surface Measurement Instrument
SMI
Redefining speed and accuracy in non-contact metrology, the Optikos SMI is a high-speed surface topography instrument that characterizes spherical, toric, and aspheric surfaces. The SMI measures surface shape deviations of precision surfaces using wavefront analysis technology. Configured to measure such items as: micro-optics, ball lenses, and contact lens molds, the instrument allows users to easily measure aspheric and toric parts without the need for reference surfaces.
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Sofyware
BuildIT Construction
BuildIT Software & Solutions Ltd.
BuildIT Construction is a construction verification software solution that enables AEC professionals to facilitate and accelerate prefabricated part positioning and monitoring, validation to BIM and project evaluation with high accuracy by using 3D analysis in adherence to design and structural specifications. Utilizing BuildIT Construction allows users to drastically reduce costs and detect errors early on to avoid expensive rework. Leveraging the robust and powerful platform of BuildIT’s cutting-edge 3D metrology software for manufacturing, BuildIT Construction addresses all quality assurance and quality control processes throughout the building and facility lifecycle.
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Laser Tracker System
Leica Absolute Tracker AT403
New all-in-one large-volume laser tracker system that sets a new standard for portability, simplicity, robust construction and measurement efficiency. An all-in-one metrology solution more portable than any other on the market, the Leica Absolute Tracker AT403 from Hexagon Manufacturing Intelligence is a self-contained measurement workshop inside a compact and convenient single case. With outperforming measurement process speed, operational simplicity like no other laser tracker and an unmatched level of robust construction, the Leica Absolute Tracker AT403 is a calculated bundle of affordable innovation without equal on the portable measurement market. Improvements include faster and more economical stationary and continuous measurement processes, along with a streamlined station change procedure. Added WiFi access point functionality and hot-swappable batteries deliver unmatched measurement freedom. Designed for leading results in almost any imaginable measurement environment, it is rated for operation in temperatures ranging from -15 to 45 degrees Celsius and features built-in environmental monitoring, orient-to-gravity functionality and construction in line with the rigorous IP54 certification standard.
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Metrology Solutions for Semiconductors
Bruker Semiconductor develops, manufactures, markets, and supports metrology solutions for thin films, which are based on novel, rapid, non-contacting and non-destructive X-ray technology. With Bruker’s acquisition of Jordan Valley Semiconductors, a name synonymous with unparalleled worldwide customer service and support, 75% of the world's top 25 semiconductor manufacturers rely on Bruker metrology tools for front-end and back-end applications, including development of their next-generation thin films. Bruker commitment to innovation and technology leadership drives the continued release of new advancements in metrology, and has garnered numerous awards and industry recognition. In applications ranging from C-S thin films materials characterization to wafer substrate analysis and defect detection, Bruker’s systems provide simulation analysis and fit. HRXRD, XRR, WA-XRD, and XRDI measurement types are fully supported, enabling researchers, production engineers, and process developers unparalleled capabilities. Whether you are a semi and C-S fabricator, R&D center or academy, or an industry materials research facility, Bruker has a specifically designed solution for your metrology needs.
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White Light Continuum Generator
JIBE
A powerful coherent light source. Due to its amazing wide spectral band, the white light continuum is being applied in different areas such as optical parametric amplification, optical metrology, optical coherence tomography, materials characterization, etc.
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Metrology Software
ZYGO has been developing metrology software for decades – our commitment to helping our customers measure confidently, and the heart of our quality guarantee. Our original instrument software, MetroPro, established itself as a gold standard in the optical metrology world. Now, its successor Mx continues that legacy: trusted, easy to use, and heavily customizable.
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Optical Filter Sets
Our filter sets support a great range of fluorophores for microscopes and imaging systems. Patented design techniques drive some of the most spectrally sophisticated optical filters on the market. High transmission, steep edges, precise spectral edge placement, and optimized blocking combine for more reliable measurements. A wide selection of individual bandpass filters and dichroic beam-splitters support unique applications, and world-class manufacturing and cutting-edge metrology ensure consistent performance that always meets specifications.
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Static and dynamic analysis
MEMS
Static and dynamic analysis and visualization are critical parts of the test and development process for MEMS microstructures in order to characterize surface metrology and measure in and out of plane motions. The PS4L Adaptive Architecture is ideal for configuring a system to perform tests to very specialized requirements of the MEMS customer. MEMS customers often require vacuum probing, which is available in semiautomatic and fully automatic configurations.
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Spindle Measurement Metrology System
SpinCheck
Measure and analyze spindle and motor performance with our SpinCheck spindle metrology system and non-contact capacitive displacement sensorsThe SpinCheck system includes a desktop PC, data acquisition and timing boards, comprehensive SpinCheck measurement and analysis software, and associated cables and accessories. SpinCheck measures and stores all data for analysis, display, printout or storage for future use.
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Industrial Calibrators
A temperature calibrator, often called a thermometer calibrator, is used to correct inaccuracies in installed thermometers and temperature sensors, because temperature measurement is a critical parameter in many industrial processes. Although simulators are sometimes called temperature calibrators or thermometer calibrators and may be used to provide thermometer calibration for the electronics in an installed system, a temperature source with a calibrated reference sensor is still required to provide a complete and meaningful calibration. Fluke Calibration industrial and field temperature calibrators include: Metrology Wells; Field Metrology Wells; field dry-well calibrators; handheld dry block calibrators; Micro-Baths; large target infrared calibrators; field IR calibrators; ice-point dry-well; and thermocouple furnaces.
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Advanced Metrology System
NGS 3500L
This top performance system is designed for applications where high-speed defect detection and precision measurements on wafers and other parts are required. It is well suited for use as a dedicated production tool or as a versatile processdevelopment system. It features a powerful set of automated as well as semi-automatic optical/ video tools optimized for high accuracy, production throughput, and ease of use.
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Advanced Packaging & TSV
FilmTek 2000M TSV
Scientific Computing International
Advanced semiconductor packaging metrology system providing an unmatched combination of speed, accuracy, and precision for high-throughput measurements of resist thickness, through silicon vias (TSVs), Cu-pillars, bumps, redistribution layer (RDL) and other packaging processes.
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Length Gauges
HEIDENHAIN length gauges deliver high accuracy, even over large measuring ranges. They are commonly used wherever fast, reliable, and accurate measurements are required, such as in production metrology, multi-gauging fixtures, measuring equipment monitoring, and position measurement.
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Compound Semi | MEMS | HDD Manufacturing
KLA has a comprehensive portfolio of inspection, metrology, and data analytics systems to support power devices, RF communications, LED, photonics, MEMS, CPV solar and display manufacturing. High brightness LEDs are becoming commonly used in solid-state lighting and automotive applications, and LED device makers are targeting aggressive cost and performance improvements, requiring more emphasis on improved process control and yield. Similarly, leading power device manufacturers are targeting faster development and ramp times, high product yields and lower device costs, and are implementing solutions for characterizing yield-limiting defects and processes. KLA's inspection, metrology and data analytics systems help these manufacturers control their processes and increase yield.
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Calibration Baths
Fluke Calibration temperature baths provide optimal temperature environments for “secondary” or “comparison” temperature calibrations. They offer unsurpassed stability and uniformity, a large working volume, and flexibility for performing thermometer calibration on calibrating a variety of temperature sensors. A world-class temperature controller and 30+ years of experience make these the choice of National Metrology Institutes and calibration laboratories worldwide. Fluke Calibration temperature baths include: compact temperature baths; deep-well temperature baths; standard calibration baths; resistor maintenance baths; ice-point baths; bath / temperature controllers.
